Optical illumination instrument

Details Optical illumination instrument Optical illumination instrument

1994-01-10

1995-08-08

Shafer, Ricky D.

Optical: systems and elements

Compound lens system

With curved reflective imaging element

359853, 359858, 359861, 355 53, 355 67, 362298, 21912174, G02B 510, G02B 1706, B23K 2600, G03B 2128

Patent

active

054404231

ABSTRACT:
In an optical illumination instrument for use in photolithographic process of manufacturing semiconductor devices, a reflection type homogenizer is composed of an array of paraboloid mirrors of a same size arranged on a same plane.

REFERENCES:
patent: 1987357 (1935-01-01), Bergen et al.
patent: 2036146 (1936-03-01), Kampfer
patent: 4389115 (1983-06-01), Richter
patent: 4484334 (1984-11-01), Pressley
patent: 4518232 (1985-05-01), Dagenais
patent: 4692583 (1987-09-01), Kimura et al.
patent: 4806724 (1989-02-01), Kawai et al.
patent: 5148326 (1992-09-01), Hohberg
patent: 5245454 (1993-09-01), Blonder
patent: 5285320 (1994-02-01), Hohberg

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