Illumination – Light source and modifier – Plural serial lens elements or components
Reexamination Certificate
2005-07-05
2005-07-05
O'Shea, Sandra (Department: 2875)
Illumination
Light source and modifier
Plural serial lens elements or components
C331S143000, C359S621000, C359S624000
Reexamination Certificate
active
06913373
ABSTRACT:
The present invention provides an optical illumination device that permits an increase in the fill of a multiplicity of light sources that constitute a secondary source formed on an illuminated pupil plane. A fly's eye lens that forms a multiplicity of light sources from a light beam emitted by an optical integrator is disposed in the optical path between the optical integrator and an irradiation surface. The fly's eye lens comprises, in order from the light-source side, a first fly's eye member and a second fly's eye member. A cylindrical lens group arranged in a first direction is formed on each of the light source-side surface of a first fly's eye member and the light source-side surface of a second fly's eye member, and a cylindrical lens is group arranged in a second direction orthogonal to the first direction is formed on each of the irradiation surface side surface of the first fly's eye member and the irradiation surface side surface of the second fly's eye member.
REFERENCES:
patent: 4682885 (1987-07-01), Torigoe
patent: 5594526 (1997-01-01), Mori et al.
patent: 5847746 (1998-12-01), Takahashi
patent: 5926257 (1999-07-01), Mizouchi
patent: 5963305 (1999-10-01), Mizouchi
patent: 6048081 (2000-04-01), Richardson
patent: 6212011 (2001-04-01), Lissotschenko et al.
patent: 6243206 (2001-06-01), Wangler
patent: 6497488 (2002-12-01), Yamauchi et al.
patent: 6583937 (2003-06-01), Wangler et al.
patent: 6587181 (2003-07-01), Jinbo et al.
patent: 6614597 (2003-09-01), Mizouchi
patent: 6738129 (2004-05-01), Mizouchi
patent: 6741394 (2004-05-01), Tanitsu et al.
patent: 2004/0125459 (2004-07-01), Tanitsu et al.
patent: 014 196 (2000-06-01), None
patent: 180 726 (2002-02-01), None
patent: A-7-130600 (1995-05-01), None
patent: A-2001-176766 (2001-06-01), None
patent: A-2002-57081 (2002-02-01), None
patent: A-2002-75835 (2002-03-01), None
Tanaka Hirohisa
Tanitsu Osamu
Toyoda Mitsunori
Alavi Ali
Nikon Corporation
O'Shea Sandra
Oliff & Berridg,e PLC
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