Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1983-10-24
1989-07-18
McGraw, Vincent P.
Optics: measuring and testing
By particle light scattering
With photocell detection
356360, 356359, G01B 902, G01B 1130
Patent
active
048489085
ABSTRACT:
Two optical beams of different frequencies are focussed as concentric spots, one spot being larger than the other, on a reflective surface whose roughness is to be measured. The smaller spot has a maximum dimension that is smaller than any significant deviation of the profile of the surface from spatial uniformity, and the larger spot has a minimum dimension that is larger than any significant deviation of the surface profile from spatial uniformity. The two beams are reflected from the surface along a common path with a phase difference that is measured by a heterodyne interferometric technique. The phase difference measurement is indicative of the roughness of the surface, and is substantially insensitive to vibration of the surface.
REFERENCES:
patent: 3796495 (1974-03-01), Laub
patent: 4340304 (1982-07-01), Massie
patent: 4353650 (1982-10-01), Sommargren
patent: 4498770 (1985-02-01), Corwin et al.
patent: 4534649 (1985-08-01), Downs
Sommargren, "Optical Heterodyne Profilometry", AO, vol. 20, No. 4, pp. 610-618 (2-15-81).
Bennett et al., "Stylus Profiling Instrument for Measuring Statistical Properties of Smooth Optical Surfaces", AO, vol. 20, No. 10, pp. 1785-1802 (5-15-81).
Lockheed Missiles & Space Company Inc.
McGraw Vincent P.
Morrissey John J.
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