Optical heterodyne interference detecting apparatus for measurin

Optics: measuring and testing – Material strain analysis – By light interference detector

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73655, 73657, 356349, G01L 124

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active

051702193

ABSTRACT:
An optical heterodyne interference type detecting apparatus for measuring a displacement characteristic of a workpiece, including a device for applying a controlled physical quantity to the workpiece to induce a displacement of the workpiece, an optical heterodyne interference type displacement detecting device for detecting a difference in one of a frequency and a phase between a measuring light beam reflected by the portion of the workpiece and a reference light beam, and thereby detecting an amount of the displacement of the workpiece, and an arithmetic and control device for obtaining the displacement characteristic of the workpiece, based on the physical quantity and the amount of displacement detected by the displacement detecting device.

REFERENCES:
patent: 4412172 (1983-10-01), Vig
patent: 4432239 (1984-02-01), Bykov
patent: 4577131 (1986-03-01), Soobitsky
patent: 4581939 (1986-04-01), Takahashi
patent: 4823601 (1989-04-01), Barna
patent: 4892406 (1990-01-01), Waters
patent: 4905519 (1990-03-01), Makowsky
patent: 4928527 (1990-05-01), Burger et al.

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