Optical heating device for rapid thermal processing (RTP) system

Details Optical heating device for rapid thermal processing (RTP) system Optical heating device for rapid thermal processing (RTP) system

1999-01-27

2000-09-19

Walberg, Teresa

Electric resistance heating devices

Heating devices

Radiant heater

118725, F21V 700

Patent

active

061224405

ABSTRACT:
An optical heating device for use in a rapid thermal processing (RTP) system includes a substrate having first and second sides. A plurality of lamps are arranged in generally coaxially circles on the first side of the substrate. An optical reflector portion is formed in the substrate adjacent the lamps and is configured and positioned to reflect light from the lamps toward an object to be heated. The reflector is formed as a trough in the substrate.

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"Reflectors for Efficient and Uniform Distribution of Radiation for Lighting and Infrared Based on Non-Imaging Optics", by W. Cai et al., SPIE, vol. 1528, pp. 118-128, (1991).
"Thermal Processing: The RTP Race Heats Up", by P. Singer, Semiconductor International, pp. 64-70, (Mar. 1996).

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