Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1980-01-25
1983-12-20
Bernstein, Hiram H.
Metal working
Method of mechanical manufacture
Assembling or joining
350 9612, 156600, 156662, G02B 5172
Patent
active
044208731
ABSTRACT:
A method for fabricating three-dimensional optical waveguides is disclosed. In this method, a single crystal semiconductor layer is grown upon an insulator which has an index of refraction lower than the semiconductor. The semiconductor layer is deposited to a thickness which provides confinement of light propagating in the semiconductor layer in the vertical direction. An effective larger index of refraction over a cross-sectional region of the semiconductor layer is then formed to provide confinement of light in the lateral direction. In the preferred method, the growth of single crystal semiconductor upon the insulator is achieved by a vapor-phase lateral epitaxial overgrowth technique.
Devices fabricated according to the method are also disclosed.
REFERENCES:
patent: 3984173 (1976-10-01), Shaw
patent: 4067641 (1978-01-01), Holton
patent: 4177094 (1979-12-01), Kroon
patent: 4220395 (1980-09-01), Wang et al.
Bozler Carl O.
Leonberger Frederick J.
McClelland Robert W.
Melngailis Ivars
Bernstein Hiram H.
Brook David E.
Massachusetts Institute of Technology
Reynolds Leo R.
Smith, Jr. Arthur A.
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