Optical grating and encoder

Details Optical grating and encoder Optical grating and encoder

1996-05-17

2000-07-25

Henry, Jon W.

Optical: systems and elements

Diffraction

From grating

359575, 250237G, G02B 518, G01B 1100, G01B 1114, H01J 314

Patent

active

060943076

ABSTRACT:
An encoder has the capability of outputting a stable displacement signal with small distortion. The encoder includes a first scale and a second scale. The first or second scale has a scale pattern in which pattern elements are arranged in such a manner that the spacings between adjacent pattern elements are not constant but vary in phase relative to the reference phase of a reference pattern element by amounts of P/(2.multidot.L), P/(2.multidot.m), P/(2.multidot.n), P/(2.multidot.o), . . . (L, m, n, o, . . . are positive integers, P is the mean pattern period) and by amounts of combinations of sums of these values.

REFERENCES:
patent: 4667099 (1987-05-01), Arai et al.
patent: 5068530 (1991-11-01), Ieki et al.
patent: 5182613 (1993-01-01), Ieki et al.
patent: 5422723 (1995-06-01), Paranjpe et al.
patent: 5428445 (1995-06-01), Holzapel
patent: 5528364 (1996-06-01), Koike

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