Optical glass

Details Optical glass Optical glass

2007-10-31

2010-06-01

Group, Karl E (Department: 1793)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S009000

Reexamination Certificate

active

07727918

ABSTRACT:
An optical glass that contains Si, Al, Mg, and O is provided. The optical glass contains Si in an amount of 40% or more and 60% or less, in cation percent, Al in an amount of 10% or more and 35% or less, in cation percent, and Mg in an amount of 20% or more and 35% or less, in cation percent. In the optical glass, the total amount of Si, Al, and Mg is 99.5% or more, in cation percent. Furthermore, the optical glass contains Fe and Na each in an amount of 0.01 wtppm or less and has a transmittance to a light having a wavelength of 248 nm of 40% or more at a thickness of 5 mm.

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John H. Burnett et al., “High Index Materials for 193 nm Immersion Lithography,” 5754 Proceedings SPIE 611-21 (2005).
S. H. Wemple et al., “Oxygen Octahedral Ferroelectrics: II. Electro-Optical and Nonlinear-Optical Device Applications,” 40(2) J. Appl. Phys. 735-52 (Feb. 1969).

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