Optical gauge with adjustable light path bending mirror

Optics: measuring and testing – By polarized light examination – With light attenuation

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Details

G01B 1102, G01B 1124

Patent

active

058568743

ABSTRACT:
In an optical gauge according to the invention, a mirror holder ring 21 is fitted to the outer periphery of the objective lens 12 and an light path bending mirror 22 is rotatably secured at the upper end thereof to the mirror holder ring 21. With such an arrangement, the light downwardly emitted from an optical system 3 irradiates the top plane of an object of measurement when the light path bending mirror 22 is held in parallel with the optical axis of the optical system 3. On the other hand, the light emitted from the optical system 3 is rectangularly turned to irradiate a lateral plane of the object of measurement when the light path bending mirror 22 is turned around its upper end to a position where it is inclined by 45.degree. relative to the optical axis of the optical system 3. Thus, an optical gauge according to the invention can observe one or more than one lateral sides of the object of measurement for dimensional measurement without modifying its attitude.

REFERENCES:
patent: 4421410 (1983-12-01), Karasaki
patent: 5097119 (1992-03-01), Breitmeier
patent: 5140643 (1992-08-01), Izumi et al.
patent: 5452080 (1995-09-01), Tomiya

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