Optical gap measuring

Details Optical gap measuring Optical gap measuring

1984-01-16

1986-10-21

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356358, G01B 902

Patent

active

046182616

ABSTRACT:
A lens or fiberoptic cable focuses energy from a collimated helium neon laser beam upon a point on a mask. Some of the focused energy is reflected from the mask upon a photodetector array in an image plane, and some of this energy is reflected from a substrate closely adjacent to the mask after passing through the mask upon the photodetector array to produce an interference pattern that is sensed and characterized by a spatial frequency representative of the distance between the mask and substrate.

REFERENCES:
patent: 4072423 (1978-02-01), Kimura et al.
patent: 4352565 (1982-10-01), Rowe et al.
Green et al., "Corneal Thickness Measured by Interferometry" JOSA, vol. 65, No. 2, pp. 119-123, 2/75.
Kawasaki et al., "Modal-Noise Generation in Biconical-Taper Couplers", Optics Letters, vol. 6, No. 10, pp. 499-501, 10/81.

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