Optical fiber guide structure and method of fabricating same

Details Optical fiber guide structure and method of fabricating same Optical fiber guide structure and method of fabricating same

1994-10-26

1996-06-18

Bovernick, Rodney B.

Optical waveguides

Accessories

External retainer/clamp

G02B 600

Patent

active

055287190

ABSTRACT:
An optical fiber guide structure used in industrial applications and a method of fabricating this structure. The optical fiber guide structure is excellent in dimensional accuracy, produces only small connection losses, and facilitates axial alignments and positioning. The method is initiated with preparing a silicon single-crystal substrate having a face of (110) orientation. An etching stopping layer, an epitaxial silicon layer, and a masking layer of silicon oxide are successively formed on the substrate. A photoresist is applied to the surface of the masking layer. Then, a development step, an etching step, and a peeling step are carried out. Thus, a substrate provided with rectangular grooves extending parallel to a (111) plane of the substrate is fabricated.

REFERENCES:
patent: 4007978 (1977-02-01), Holton
patent: 4067641 (1978-01-01), Holton
patent: 4466696 (1984-08-01), Carney
patent: 4883561 (1989-11-01), Gmitter et al.
patent: 5357122 (1994-10-01), Okubora et al.

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