Optical exposure apparatus

Details Optical exposure apparatus Optical exposure apparatus

1976-03-26

1977-11-08

Hix, L. T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

356172, 250491, G01B 1126, G03B 2754

Patent

active

040573478

ABSTRACT:
An improved optical exposure apparatus for use in exposing a workpiece to a desired light pattern with a high alignment accuracy and a high operational speed is disclosed. The apparatus comprises a moving table on which a workpiece to be exposed is disposed, a movable holder on which a mask having an original pattern is disposed, a light source for irradiating said mask, a reduction lens for projecting a reduced pattern of said original pattern onto said workpiece, means for positioning said moving table to a predetermined position, means for detecting the error of said table positioning, means for calculating a value of the error of positioning the workpiece divided by the reduction rate of the reduction lens, and means for automatically shifting said movable holder by the calculated value so as to cancel said error.

REFERENCES:
patent: 3207904 (1965-09-01), Heinz
patent: 3704946 (1972-12-01), Brault et al.
patent: 3843916 (1974-10-01), Trotel et al.

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