Optical emission spectroscopy of plasma treated bonding...

Details Optical emission spectroscopy of plasma treated bonding... Optical emission spectroscopy of plasma treated bonding...

2007-01-02

2007-01-02

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

Reexamination Certificate

active

10991694

ABSTRACT:
A method and system are provided for real-time contaminant detection and plasma treatment verification during plasma treatment of bonding surfaces. Optical emission spectroscopy (OES) is utilized to determine contamination of a bonding surface prior to the bonding process. OES is further utilized to monitor bonding sites on the bonding surface to verify effectiveness of the plasma treatment.

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patent: 2003/0232448 (2003-12-01), Shelley et al.
patent: 2004/0003828 (2004-01-01), Jackson
patent: 2004/0099806 (2004-05-01), Shelley et al.
patent: 2005/0263170 (2005-12-01), Tannous et al.

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