Optical element with an optical axis

Details Optical element with an optical axis Optical element with an optical axis

2007-11-13

2007-11-13

Robinson, Mark A. (Department: 2872)

Optics: measuring and testing

Range or remote distance finding

With photodetection

Reexamination Certificate

active

10489030

ABSTRACT:
The invention concerns an optical element (1) with an optical axis (3), designed in particular for an exposure lens used in semiconductor lithography. Said optical element comprises at least an extension (2, 2′) in the direction of the optical axis (3). A device (11) enables to induce a two-wave or multiple wave deformation in said optical element (1). At least a system (12) mounted in the extension zone (2, 2′) is designed to apply a force in said extension (2, 2′).

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