Stock material or miscellaneous articles – Structurally defined web or sheet – Including aperture
Reexamination Certificate
2005-08-05
2009-08-18
Watkins, III, William P (Department: 1794)
Stock material or miscellaneous articles
Structurally defined web or sheet
Including aperture
C428S209000, C430S004000, C430S005000
Reexamination Certificate
active
07575798
ABSTRACT:
A substrate includes an opaque chrome coating on a surface of the substrate dry-etched to form an aperture, wherein chrome in the aperture is below detectable limit. A method of forming an opaque chrome coating on a substrate includes depositing an initial thickness of the opaque chrome coating on the substrate without ion-assist or with undetectable ion-assist and depositing the remainder of the opaque chrome coating with or without ion-assist. In one embodiment the invention is directed to an apertured optical element having a substrate transmissive to light and an opaque chrome coating on the substrate defining an aperture. Three- and four-layer opaque coatings of various materials are disclosed, including three-layer chrome/chrome oxide/chrome coatings.
REFERENCES:
patent: 4139443 (1979-02-01), Sakurai
patent: 4166148 (1979-08-01), Sakurai
patent: 4178403 (1979-12-01), Sakurai et al.
patent: 4363846 (1982-12-01), Kaneki
patent: 5230971 (1993-07-01), Aplay et al.
patent: 5976639 (1999-11-01), Iwata et al.
patent: 6562549 (2003-05-01), Zemen et al.
patent: 6635394 (2003-10-01), Hung
patent: 6667837 (2003-12-01), Shockey
patent: 7160628 (2007-01-01), Bellman et al.
patent: 2007/0128527 (2007-06-01), Chua et al.
J. D. Rancort, “Optical Thin Films User Handbook”, SPIE Opt. Eng. Press, Bellingham, WA (1996) pp. 126-129.
P. Baumeister, “Starting designs for the computer optimization of optical coatings”, Appl. Opt. 34(22) 4835 (1995).
Y. Huang, et al, “Extended Chamber Matching and Repeatability Study for Chrome Etch,” Proceedings of SPIE, vol. 4562, pp. 624-632 (2002).
J.O. Clevenger, et al, “Effect of chamber seasoning on the chrome dry etch process” Proceedings of SPIE vol. 5130, pp. 92-100 (2003).
R. B. Anderson, et al “Study of the role of Cl2, O2, and He in the chrome etch process with optical emission spectroscopy” Proceedings of SPIE, vol. 4889 pp. 641-652(2002).
R.B. Anderson, et al “Improvement of chrome CDU by optimizing focus ring design,” Proceedings of SPIE, vol. 5130, No. 1, pp. 264-274 (2003).
M. Mueller, et al, “Dry Etching of Chrome for Photomasks for 100 nm Technology using Chemically Amplified Resist”, Proceedings of SPIE vol. 4754, pp. 350-360 (2002).
B. Grenon, “What's wrong with Chromium as a photomask film”, Chrome Absorber Workshop, SEMETECH, Feb. 5, 2003.
C. Constantine, “Chrome mask etching: The good, the bad, and the ugly”, Chrome Absorber Workshop, SEMETECH, Feb. 2004.
H. Chen, et al, “Multilayer Bottom Antireflective Coating for High Numerical Aperature and Modified Illumination Exposure Systems,” Jpn. J. Appl. Physics, vol. 42 (2003) pp. 3737-3742.
Bellman Robert A.
Quintal Jose M.
Sachenik Paul A.
Ukrainczyk Ljerka
Corning Incorporated
Douglas Walter M.
Watkins, III William P
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