Optical: systems and elements – Light interference – Produced by coating or lamina
Reexamination Certificate
2006-06-13
2011-11-01
Amari, Alessandro (Department: 2872)
Optical: systems and elements
Light interference
Produced by coating or lamina
C359S359000, C359S586000, C355S053000
Reexamination Certificate
active
08049964
ABSTRACT:
An optical element (14) transparent for radiation with a wavelength λ in the ultraviolet wavelength range below 250 nm, in particular at 193 nm, comprises a substrate (17) with a refractive index nSlarger than 1.6, and an antireflection coating (16) formed on at least part of the surface of the substrate (17) between the substrate (17) and an ambient medium with a refractive index nA, preferably with nA=1.0. The antireflection coating (16) consists of a single layer of a material with a refractive index nLof about nL=√{square root over (nAnS)}, in particular nL>1.3, and the optical thickness dLof the single layer is about λ/4. The optical element (14) is preferably part of a projection objective (5) in a microlithography projection exposure apparatus (1) and located adjacent to a light-sensitive substrate (10).
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Pazidis Alexandra
Zaczek Christoph
Amari Alessandro
Carl Zeiss SMT GmbH
Sughrue & Mion, PLLC
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