Optical element, thin film structure, optical switch, and...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S295000, C359S298000, C359S224200

Reexamination Certificate

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10676733

ABSTRACT:
An optical element which includes a reflection portion capable of reflecting a light beam in a desired direction is provided. The optical element comprises a substrate21, a light reflection portion101, and a support portion102which supports the light reflection portion101over the substrate21. Each of the light reflection portion101and the support portion102is constructed of at least one film. The support portion102has one end102cfixed to the substrate21and has the other end102djoined with the film constructing the light reflection portion101, and it bends from one end102ctoward the other end102d, thereby to support the principal plane of the film constructing the light reflection portion101, non-parallelly, for example, perpendicularly to the principal plane of the substrate21.

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