Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-02-13
2007-02-13
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S295000, C359S298000, C359S224200
Reexamination Certificate
active
10676733
ABSTRACT:
An optical element which includes a reflection portion capable of reflecting a light beam in a desired direction is provided. The optical element comprises a substrate21, a light reflection portion101, and a support portion102which supports the light reflection portion101over the substrate21. Each of the light reflection portion101and the support portion102is constructed of at least one film. The support portion102has one end102cfixed to the substrate21and has the other end102djoined with the film constructing the light reflection portion101, and it bends from one end102ctoward the other end102d, thereby to support the principal plane of the film constructing the light reflection portion101, non-parallelly, for example, perpendicularly to the principal plane of the substrate21.
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Ishizuya Tohru
Suzuki Junji
Suzuki Yoshihiko
Lester Evelyn A.
Morgan & Lewis & Bockius, LLP
Nikon Corporation
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