Optical element surface monitoring system and method

Details Optical element surface monitoring system and method Optical element surface monitoring system and method

1998-11-16

2000-04-04

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

G01N 2155

Patent

active

060468025

ABSTRACT:
An optical element surface monitoring system includes an optical beam shaper and an optical sensor. The optical beam shaper directs an input beam of light from a laser source onto a surface portion of an optical element. The optical sensor receives a reflected beam of light from the optical element, derived from the input beam of light. The power of the reflected beam of light is monitored for an unexpected dropoff as an indicator of damage to the surface portion.

REFERENCES:
patent: H376 (1987-12-01), Bremer
patent: 4385832 (1983-05-01), Doi et al.
patent: 4423726 (1984-01-01), Imagawa et al.
patent: 5159402 (1992-10-01), Ortiz
patent: 5323269 (1994-06-01), Walker et al.

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