Optical element, production method of optical element, optical s

Details Optical element, production method of optical element, optical s Optical element, production method of optical element, optical s

1996-02-28

1997-09-23

Wong, Don

Illumination

Light modifier

Reflector

362347, 359619, 378 34, 378 84, G21K 106

Patent

active

056697082

ABSTRACT:
An optical element for X-ray reflection according to the present invention is provided with a number of fine convex surfaces or concave surfaces regularly arranged on a substrate. Multilayer films reflecting X-rays are formed over the convex surfaces or concave surfaces. The convex surfaces or concave surfaces have such a shape that when X-rays enter each concave surface or convex surface, they are reflected with a certain diverging angle by the multilayer films and as a result that a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a certain distance apart from the concave surfaces or convex surfaces. By this, a number of secondary X-ray sources are formed to enable uniform irradiation of X-rays in a wide region.

REFERENCES:
patent: 4924490 (1990-05-01), Hashimoto et al.

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