Optical element positioning apparatus, projection optical...

Details Optical element positioning apparatus, projection optical... Optical element positioning apparatus, projection optical...

2008-07-11

2010-10-26

Stultz, Jessica T (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S813000

Reexamination Certificate

active

07821726

ABSTRACT:
An optical element is moved in six-degrees-of-freedom. Three first displacement sensors are disposed on a base plate and measure respective displacement amounts of three mutually different points on the optical element in a first direction. A second displacement sensor measures a displacement amount of one point on the optical element in a second direction. Two third displacement sensors measure respective displacement amounts of two mutually different points on the optical element in a third direction. A transformation processor transforms the six measured displacement amounts. A calibration processor calibrates the transformed displacement amounts with a calibration matrix of which coefficients are previously obtained to calibrate the displacement amounts in the six-degrees-of-freedom, which have errors due to measurement errors of the displacement sensors. A controller outputs command values based on differences between the calibrated displacement amounts and target displacement amounts.

REFERENCES:
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patent: 2007/0183064 (2007-08-01), Shibazaki
patent: 2007/0260419 (2007-11-01), Hagiwara
patent: 2007/0263191 (2007-11-01), Shibazaki
patent: 2009/0225297 (2009-09-01), Bleidistel et al.
patent: 2009/0231561 (2009-09-01), Arai
patent: 2005-175177 (2005-06-01), None
patent: 2006-250587 (2006-09-01), None

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