Optical element, optical module and method for manufacturing...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

Reexamination Certificate

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C257S444000, C257SE33072, C372S050210

Reexamination Certificate

active

07659592

ABSTRACT:
A method for manufacturing an optical element having a surface-emitting type semiconductor laser and a photodetector element that detects light emitted from the surface-emitting type semiconductor laser, the method including the steps of: (a) laminating, above a substrate, semiconductor layers for forming a first mirror, an active layer, a second mirror, a photoabsorption layer, an etching stopper layer and a contact layer; (b) patterning the semiconductor layers to form at least a photoabsorption layer, an etching stopper layer and a contact layer; (c) forming an electrode above the contact layer; and (d) etching a portion of the contact layer until an upper surface of the etching stopper layer is exposed.

REFERENCES:
patent: 5757837 (1998-05-01), Lim et al.
patent: 5887013 (1999-03-01), Lee
patent: 6753214 (2004-06-01), Brinkmann et al.
patent: 7242704 (2007-07-01), Kaneko
patent: 7289547 (2007-10-01), Trezza et al.
patent: 10-135568 (1998-05-01), None
patent: 2002-184787 (2002-06-01), None

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