Optical element, optical apparatus, film forming method,...

Details Optical element, optical apparatus, film forming method,... Optical element, optical apparatus, film forming method,...

2007-11-13

2007-11-13

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Multilayer filter or multilayer reflector

Reexamination Certificate

active

11144168

ABSTRACT:
An optical element includes a multilayer film, and a substrate, wherein the multilayer film includes a first thin film that is formed on the substrate, and made of fluorine-doped oxide or nitride, and a second thin film that is formed on the first thin film, and made of a fluoride material.

REFERENCES:
patent: 2002/0035024 (2002-03-01), Kato
patent: 11-223707 (1999-08-01), None
patent: 2001-279437 (2001-10-01), None
English Abstract of Japanese Patent Publication No. 1-223707.
English Abstract Japanese Patent Publication No. 2001-279437.

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