Optical: systems and elements – Lens – With support
Reexamination Certificate
2005-02-22
2005-02-22
Mack, Ricky (Department: 2873)
Optical: systems and elements
Lens
With support
C359S822000, C359S813000
Reexamination Certificate
active
06859337
ABSTRACT:
Optical-element mountings are disclosed for holding an optical element relative to an optical column of an optical system. The optical element can have mounting protrusions extending therefrom or lack such features. An exemplary embodiment of a mounting has a respective holding device mounted to each mounting protrusion. Each holding device has a first spring-loaded support member providing rigid support of the element in a gravity direction and flexible support in tangential, radial, and tilt directions. Each holding device also can include a second spring-loaded support member providing rigid support of the element in tangential directions and flexible support in the gravity and radial directions. Another embodiment includes multiple holding devices at respective locations relative to a mounting surface of the element. Each holding device includes a respective linking unit extending from the optical column to a respective bonding member attached to a bonding location on the mounting surface. Each bonding member has a bonding pad bonded to the respective bonding location and at least first and second spring members extending from the bonding pad in respective directions to the linking unit.
REFERENCES:
patent: 4681408 (1987-07-01), Ahmad et al.
patent: 4726671 (1988-02-01), Ahmad et al.
patent: 5249082 (1993-09-01), Newman
patent: 5986827 (1999-11-01), Hale
patent: 6392825 (2002-05-01), Trunz et al.
patent: 6400516 (2002-06-01), Spinali
patent: 20030162484 (2003-08-01), Oshino
patent: 1 312 965 (2003-05-01), None
patent: 08-68899 (1996-03-01), None
“Construction of the Projection Optics Box for the Engineering Test Stand”, presentation to International SEMATECH, by John S. Taylor, Oct. 2000, 24 pages.
“Fabrication of ETS Set II Optics: Results and Future Development”, presentation to 2ndInternational Workshop on EUV Lithography, by Lou Marchetti et al., Oct. 2000, 20 pages.
“High-NA Camera for an EUVL Microstepper”, presentation by Layton Hale et al., Oct. 2000, 13 pages.
Okuyama Takeshi
Oshino Tetsuya
Mack Ricky
Nikon Corporation
LandOfFree
Optical-element mountings exhibiting reduced deformation of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical-element mountings exhibiting reduced deformation of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical-element mountings exhibiting reduced deformation of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3494309