Optical: systems and elements – Lens – With support
Reexamination Certificate
2011-07-26
2011-07-26
Mack, Ricky L (Department: 2873)
Optical: systems and elements
Lens
With support
Reexamination Certificate
active
07986472
ABSTRACT:
There is provided an optical element module comprising a first optical element and an optical element holder. The first optical element has a first coefficient of thermal expansion. The optical element holder holds the first optical element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being adapted to the first coefficient of thermal expansion. The optical element is directly contacting the optical element holder in a wide contact area. The contact area is defined by a first contact surface of the first optical element and a second contact surface of the optical element holder, wherein the second contact surface matches the first contact surface. Thus, favorable rigidity and deformation behavior is provided.
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Deufel Peter
Gellrich Bernhard
Kugler Jens
Kwan Yim-Bun Patrick
Weber Ulrich
Carl Zeiss SMT AG.
Mack Ricky L
Ohlandt Greeley Ruggiero & Perle L.L.P.
Patel Vipin M
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