Optical element, lithographic apparatus including such an...

Details Optical element, lithographic apparatus including such an... Optical element, lithographic apparatus including such an...

2007-03-27

2007-03-27

Wells, Nikita (Department: 2881)

Radiant energy

Radiation controlling means

C250S50400H, C359S634000, C359S627000, C359S572000, C359S350000, C359S351000, C359S361000

Reexamination Certificate

active

11025851

ABSTRACT:
An optical element including an anti-reflection (AR) coating is configured to reflect Extreme-Ultra-Violet (EUV) radiation only.

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