Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-04-25
2006-04-25
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C359S452000
Reexamination Certificate
active
07034923
ABSTRACT:
An optical element includes a substrate having at least one surface on which a layer of material is disposed, the layer of material being selected to be at least partially transmissive to radiation with a predetermined wavelength λ. The surface of material includes particles having a diameter in a range of 1–500 nm and the layer of material has a layer thickness in the range of 10–2000 nm. Undesired radiations, e.g. UV and DUV radiations, are substantially reduced or eliminated by scattering, e.g. Mie scattering and/or Raleigh scattering, and/or by absorption by the particles while desired radiations are transmitted to the surface of the optical element.
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ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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