Optical element inspecting apparatus

Details Optical element inspecting apparatus Optical element inspecting apparatus

1996-10-09

1998-10-27

Epps, George Y.

Optical: systems and elements

Lens

With viewed object or viewed field illumination

359799, 359800, 356237, G02B 702, G01J 2100

Patent

active

058285008

ABSTRACT:
An optical element inspecting apparatus for inspecting optical elements for defects. The optical element inspecting apparatus includes an illuminating unit, an image capturing unit, two polarizers, a rotation device, a controller, and a means for composing a plurality of image data captured by the image capturing unit.
The optical element to be inspected is placed between the polarizers and is illuminated by the illuminating unit. The light that passes through the polarizers and the optical element is captured by the image capturing unit and stored in memory. The controller controls the rotation device such that the polarizers are rotated by a predetermined amount and a subsequent image data is captured. In this way, a number of image data are captured and all image data are composed to make a composite image data. The optical element is examined to detect flaws therein by using the composite image data.

REFERENCES:
patent: 5216481 (1993-06-01), Minato
patent: 5333052 (1994-07-01), Finarov
patent: 5504581 (1996-04-01), Natata et al.
patent: 5532823 (1996-07-01), Fukui et al.
patent: 5604591 (1997-02-01), Kitagawa

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