Optical element inspecting apparatus

Details Optical element inspecting apparatus Optical element inspecting apparatus

1996-08-23

1998-12-08

Font, Frank G.

Optics: measuring and testing

Inspection of flaws or impurities

Transparent or translucent material

356124, G01N 2100, G01B 900

Patent

active

058478221

ABSTRACT:
An optical element inspecting apparatus for detecting an optical defect of an optical element to be inspected. The inspection apparatus includes a diffusion plate, a device for emitting light towards the diffusion plate such that a diffused light diffused by the diffusion plate is incident upon an optical system including at least the optical element, and a device for intercepting a part of the diffused light so that the part of the diffused light is not incident upon the optical system. The light intercepting device is positioned substantially in a plane perpendicular to an optical axis of the optical system, between the optical system and the diffusion plate, substantially at a focal point of the optical system.

REFERENCES:
patent: 5216481 (1993-06-01), Minato

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