Optical element holding system, barrel, exposure apparatus,...

Details Optical element holding system, barrel, exposure apparatus,... Optical element holding system, barrel, exposure apparatus,...

2006-05-10

2008-03-18

Spector, David (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S813000, C359S822000, C359S823000, C359S830000

Reexamination Certificate

active

07345834

ABSTRACT:
A holding system for holding an optical element. The holding system includes a ring-like inner holding member disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces, and a ring-like outer holding member disposed at an outer periphery of the inner holding member and connected to the inner holding member at plural points. The inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators.

REFERENCES:
patent: 4153341 (1979-05-01), Kawamura et al.
patent: 5745800 (1998-04-01), Kanbara et al.
patent: 6262853 (2001-07-01), Takanashi et al.
patent: 6867848 (2005-03-01), Ebinuma et al.
patent: 6870598 (2005-03-01), Nishi
patent: 2001-343576 (2001-03-01), None
patent: 2001-343576 (2001-12-01), None

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