Optical element holding device for exposure apparatus

Details Optical element holding device for exposure apparatus Optical element holding device for exposure apparatus

2005-08-16

2005-08-16

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With support

C355S077000, C438S800000

Reexamination Certificate

active

06930842

ABSTRACT:
An optical element holding device includes a ring body for accommodating an optical element and a drive mechanism for driving the optical element. The ring body has an inner ring portion, which engages with a peripheral edge of the optical element, and an outer ring portion integral with the inner ring portion. The drive mechanism includes an actuator, a displacement increasing mechanism and a guide mechanism. The guide mechanism transfers displacement of the actuator to the inner ring and moves the inner ring axially.

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