Optical element holding apparatus, exposure apparatus and...

Optical: systems and elements – Lens – With support

Reexamination Certificate

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C359S872000

Reexamination Certificate

active

07443619

ABSTRACT:
At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.

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