Optical element holding apparatus and exposure apparatus

Details Optical element holding apparatus and exposure apparatus Optical element holding apparatus and exposure apparatus

2007-10-26

2009-08-11

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

With support

C359S823000

Reexamination Certificate

active

07573659

ABSTRACT:
A holding apparatus for holding an optical element includes a measuring part configured to measure a coordinate of the optical element, and a driving part configured to move the optical element based on the coordinate measured by the measuring part, wherein the measuring part includes a first sensor configured to detect a displacement amount of a part of the optical element, and a second sensor configured to detect that a part of the optical element is located at a predetermined position.

REFERENCES:
patent: 6593585 (2003-07-01), Loopstra et al.
patent: 2002/0163741 (2002-11-01), Shibazaki
patent: 2005/0133732 (2005-06-01), Ohtomo et al.
patent: 2003-337272 (2003-11-01), None
patent: 2001-0051996 (2001-06-01), None
Korean Office Action, dated Jan. 28, 2009, concerning Korean patent application No. 10-2007-0108121, which is a foreign counterpart to instant application. (3 pages in Korean language are provided).

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