Optical element holding apparatus and exposure apparatus

Details Optical element holding apparatus and exposure apparatus Optical element holding apparatus and exposure apparatus

2007-10-26

2009-08-11

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

With support

C359S823000

Reexamination Certificate

active

07573658

ABSTRACT:
A holding apparatus for holding an optical element includes a driving part configured to move the optical element, and a measuring part configured to measure a coordinate of the optical element, wherein number of coordinates measured by the measuring part among a degree of freedom of the optical element is greater than a driving degree of freedom of the driving part.

REFERENCES:
patent: 6312859 (2001-11-01), Taniguchi
patent: 6710848 (2004-03-01), Taniguchi
patent: 2002/0163741 (2002-11-01), Shibazaki
patent: 2005/0046792 (2005-03-01), Ito et al.
patent: 2003-337272 (2003-11-01), None

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