Optical element and optical system

Details Optical element and optical system Optical element and optical system

2005-11-22

2005-11-22

Robinson, Mark A. (Department: 2872)

Optical: systems and elements

Methods

C359S576000, C359S614000

Reexamination Certificate

active

06967796

ABSTRACT:
A diffractive optical element, which is used for an optical system of an exposure apparatus, includes a light-shielding member composed of a laminated layer of Cr oxide and Cr at a periphery of an effective area.

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