Optical element and manufacturing method thereof

Details Optical element and manufacturing method thereof Optical element and manufacturing method thereof

2006-09-05

2006-09-05

Norton, Nadine G. (Department: 1765)

Optical: systems and elements

Lens

With field curvature shaping

Reexamination Certificate

active

07102828

ABSTRACT:
An optical element and a manufacturing method therefor, an exposure apparatus, and a device manufacturing method that can reduce the effect of intrinsic birefringence under high NA conditions. According to an optical element as one aspect of the present invention, an angle between a [0 0 1] axis of an isometric crystal and an optical axis is less than 10°, and preferably 0°.

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