Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate
2007-08-28
2007-08-28
Dang, Hung (Department: 2873)
Optical: systems and elements
Lens
With field curvature shaping
C359S350000, C359S355000, C359S487030, C359S488010, C359S494010, C359S506000, C117S918000, C117S940000
Reexamination Certificate
active
10684294
ABSTRACT:
An optical element and a manufacturing method therefor, an exposure apparatus, and a device manufacturing method that can reduce the effect of intrinsic birefringence under high NA conditions. According to an optical element as one aspect of the present invention, an angle between a [0 0 1] axis of an isometric crystal and an optical axis is less than 10°, and preferably 0°.
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Takeuchi Seiji
Unno Yasuyuki
Canon Kabushiki Kaisha
Morgan & Finnegan , LLP
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