Optical waveguides – Optical imaging tunnel
Reexamination Certificate
2006-03-07
2008-10-07
Healy, Brian M (Department: 2883)
Optical waveguides
Optical imaging tunnel
C385S146000
Reexamination Certificate
active
07433568
ABSTRACT:
It is an object of the present invention to provide an optical element which forms a beam spot with homogeneous energy distribution on an irradiated surface, and a light irradiation apparatus. It is another object of the invention to provide a manufacturing method of a semiconductor device using a beam spot with homogeneous energy distribution. One feature of the invention is to homogenize energy distribution of a beam spot on an irradiated surface by forming the optical element provided with a polygonal entrance and exit using a plurality of reflectors as side walls and introducing a beam to the optical element. Further, a beam spot with a desired size or shape can be obtained by making the reflectors movable. Furthermore, by using a light irradiation apparatus using the optical element, failure in manufacturing a semiconductor device can be reduced.
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Healy Brian M
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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