Optics: image projectors – Temperature control – Means to preheat slides or film
Reexamination Certificate
2011-08-09
2011-08-09
Amari, Alessandro (Department: 2872)
Optics: image projectors
Temperature control
Means to preheat slides or film
Reexamination Certificate
active
07993008
ABSTRACT:
An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.
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G.W.W. Steve
Ishizawa Hitoshi
Kokubun Takao
Murakami Atsunobu
Shirai Takeshi
Amari Alessandro
Nikon Corporation
Oliff & Berridg,e PLC
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