Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-11-28
2008-10-28
Chowdhury, Tarifur R (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07443516
ABSTRACT:
A reference-height calculating unit calculates an original height of a distortion detecting mirror when a distortion detecting mirror and a reference mirror are set in parallel to each other. A height measuring unit measures mirror heights when the distortion detecting mirror is tilted in directions of an X axis and a Y axis. A contour-line calculating unit calculates a pair of contour lines based on the mirror heights. An intersection calculating unit calculates an intersection of the contour lines. A storing unit stores coordinates to which height of predetermined coordinates are moved by distortion in a correction table. A distortion correcting unit corrects the distortion based on the correction table.
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Fuse Takashi
Takahashi Fumiyuki
Tsukahara Hiroyuki
Chowdhury Tarifur R
Cook Jonathon D
Fujitsu Limited
Westerman, Hattori, Daniels & Adrian , LLP.
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