Optical displacement sensor for measurement of shape and coarsen

Details Optical displacement sensor for measurement of shape and coarsen Optical displacement sensor for measurement of shape and coarsen

1993-06-18

1995-06-13

Limanek, Robert P.

Optics: measuring and testing

By polarized light examination

With light attenuation

356360, 356366, 356127, 359 19, G02B 530, G01B 1103

Patent

active

054248345

ABSTRACT:
An optical displacement sensor that has a light beam polariscope located on the light path of light reflected from a target surface, and means for detecting the focal point position and transverse position of the light beam from the polariscope. The focal point position corresponds to axial displacement at the target surface, and the transverse position corresponds to inclination of the target surface, so the effect of the inclination of the surface can be compensated for by using a transverse position detection signal to adjust the light beam polariscope.

REFERENCES:
patent: 4390277 (1983-06-01), Quinn
patent: 4656348 (1982-04-01), Ando
patent: 4844617 (1989-07-01), Kelderman et al.
patent: 5062715 (1991-01-01), Nakata et al.
patent: 5161040 (1992-11-01), Yokoyama et al.
patent: 5206868 (1973-04-01), Deacon

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