Optical displacement sensor and optical encoder

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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Reexamination Certificate

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07102760

ABSTRACT:
An optical displacement sensor comprises a surface emitting laser light source, a scale and a photosensor. The surface emitting laser light source emits a light beam having a predetermined shape. The scale is displaceable in such a manner as to cross the light beam emitted from the surface emitting laser light source and has a diffraction grating of a predetermined period formed thereon for forming a diffraction interference pattern from the light beam. The photosensor receives a predetermined portion of the diffraction interference pattern. The photosensor includes light intensity detecting means comprised of a plurality of light receiving areas arranged apart from one another in a pitch direction of the diffraction interference pattern on a light receiving surface at intervals of np1(z1+z2)/z1where z1is a distance between a light-beam emitting surface of the surface emitting laser light source and a surface on which the diffraction grating is formed, z2is a distance between the surface on which the diffraction grating is formed and the light receiving surface of the photosensor, p1is the pitch of the diffraction grating on the scale, and n is a natural number.

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E. Yamamoto; “Ultra Small Sensor Using a Surface Emitting Laser”; Lecture Materials (VI) for Machinery Institute, 75th Periodic General Meeting; 1998; pp. 682-689.

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