Optical displacement sensor

Details Optical displacement sensor Optical displacement sensor

2007-01-16

2007-01-16

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S519000

Reexamination Certificate

active

10497099

ABSTRACT:
This invention relates to an optical displacement sensor element, e.g. for use in a pressure sensor or a microphone, comprising two essentially flat surfaces being separated by a cavity being defined by a spacer, the distance between the surfaces being variable thus providing a displacement sensitive Fabry-Perot interferometer. Both of said surfaces are at least partially reflective, and in that said first surface is provided with at least one optical detector, and one of surfaces being provided on an at least partially transparent material.

REFERENCES:
patent: 4983824 (1991-01-01), Saaski et al.
patent: 5128537 (1992-07-01), Hälg
patent: 5165416 (1992-11-01), Shinoda et al.
patent: 5479539 (1995-12-01), Goldsmith et al.
patent: 5589689 (1996-12-01), Koskinen
patent: 5909280 (1999-06-01), Zavracky
patent: 681047 (1992-12-01), None
patent: 0 196 784 (1986-10-01), None
patent: 0 571 107 (1993-11-01), None
patent: 2 338 059 (1999-12-01), None
patent: WO 87/02470 (1987-04-01), None
B. Grennberg Fismen et al.,A Novel Micro-Optical Microphone Based on the Fabry-Perot Principle, SINTEF Electronics and Cybernetics, p. 1-4.
Photek,Vacuum Compatible Detectors, http://fp.photek.plus.com/vcd.htm, Apr. 25, 2002, p. 1-7.

Affiliated with

Also associated with

Rating

Optical displacement sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical displacement sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical displacement sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3723873