Optical displacement sensor

Optics: measuring and testing – Material strain analysis

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G01D 526

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active

056193181

ABSTRACT:
The present invention comprises a compound cavity in which a vertical-cavity surface-emitting laser and external mirror are combined, and the change in intensity of a laser beam or in mirror loss is detected by the detection unit. The detection unit includes a photodetector for directly detecting a variation in intensity of a laser beam, and PN junction potential difference detecting device for detecting a variation in mirror loss created due to a relative displacement between the external mirror and the vertical-cavity surface-emitting laser, based on a change in carrier density within the surface-emitting laser. The phase of the laser beam returning from the external mirror is determined by a relative displacement between the external mirror and the vertical-cavity surface-emitting laser, and the laser beam output varies at a period of a displacement amount corresponding to 1/2 of the wavelength of the laser beam. Such a displacement amount is calculated by the counting device and the operation device.

REFERENCES:
patent: 4452533 (1984-06-01), Miles et al.
patent: 4475812 (1984-10-01), Buczek et al.
patent: 4655597 (1987-04-01), Yamamoto et al.
patent: 4983035 (1991-01-01), Wright et al.
patent: 5103572 (1992-04-01), Ricklefs
patent: 5331658 (1994-07-01), Shieh et al.
"Laser Diode Displacement Sensor with a Ball Lens for Use in Scanning Probe Miscroscopes," Shigeji Hara et al. Proceeding of 1992 Annual Meeting, Book G00743-1992, American Society of Mechanical Engineers, New York, pp. 33-39.
"Optical Tactile Sensor Using Surface-Emitting Laser", Eiji Yamamoto, et al, Olympus Optical Co., Ltd. pp. 227-231, 0-7803-2503-6, 1995 IEEE.

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