Optical displacement-measuring instrument

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis

Reexamination Certificate

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C356S614000, C356S617000, C356S618000, C356S619000, C033S706000, C033S707000, C250S23700G

Reexamination Certificate

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11067907

ABSTRACT:
An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that comprises a first optical grating arranged close to a light source, a second optical grating arranged on the scale, and a third optical grating arranged in a photoreceptor. A light diffuser is arranged between the light source and the first optical grating. A collimated light from the light source is diffused at the light diffuser and led to the first optical grating.

REFERENCES:
patent: 4518859 (1985-05-01), Hoshika
patent: 4661698 (1987-04-01), Cappio et al.
patent: 5841133 (1998-11-01), Omi
patent: 6410911 (2002-06-01), Omi
patent: 6526190 (2003-02-01), Holzapfel et al.
patent: A 05-087594 (1993-04-01), None
patent: A 2003-279383 (2003-10-01), None

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