Optical displacement measuring apparatus including a light-emitt

Details Optical displacement measuring apparatus including a light-emitt Optical displacement measuring apparatus including a light-emitt

1997-10-14

1999-03-09

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356354, 250237G, G01B 902

Patent

active

058808396

ABSTRACT:
An optical displacement detecting apparatus is provided for detecting information on a relative displacement with respect to an object having a diffraction grating. The apparatus includes a light-emitting element for emitting a diverging light beam, a ball lens for converting the diverging light beam from the light-emitting element into a nearly collimated beam, a grating interference optical system for using the light beam from the ball lens to finally form interference light in such a form that two diffracted light beams from the diffraction grating are coupled, and a light detecting element for detecting the interference light from the grating interference optical system, wherein the relative displacement information with respect to the object is attained from a periodic signal from the light detecting element.

REFERENCES:
patent: 3930729 (1976-01-01), Gunn
patent: 5283434 (1994-02-01), Ishizuka et al.
patent: 5390022 (1995-02-01), Ishizuka et al.
patent: 5448358 (1995-09-01), Ishizuka et al.

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