Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1997-07-21
1999-12-21
Font, Frank G.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356363, G01B 902
Patent
active
060056673
ABSTRACT:
This invention relates to an apparatus for optically measuring the relative displacement of an object with a diffraction grating, and the apparatus has a light projection system for spot-projecting a light beam onto the diffraction grating and light detection means for receiving an interference light beam obtained by multiplexing diffracted light beams of different orders from the spot projection position on the diffraction grating in a state in which the wavefronts of the diffracted light beams are matched with each other. The relative displacement of the object is measured upon light reception of the light detection means.
REFERENCES:
patent: 4658132 (1987-04-01), Nishiura et al.
patent: 4766310 (1988-08-01), Michel
patent: 4902133 (1990-02-01), Tojo et al.
Ishizuka Kou
Takamiya Makoto
Canon Kabushiki Kaisha
Font Frank G.
Nguyen Tu T.
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