Optics: measuring and testing – Position or displacement
Reexamination Certificate
2011-07-05
2011-07-05
Chowdhury, Tarifur R (Department: 2886)
Optics: measuring and testing
Position or displacement
C356S445000, C356S600000, C356S601000, C356S616000, C356S620000, C250S306000, C250S559290, C850S006000
Reexamination Certificate
active
07973942
ABSTRACT:
There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.
REFERENCES:
patent: 5196713 (1993-03-01), Marshall
patent: 5357105 (1994-10-01), Harp et al.
patent: 5537863 (1996-07-01), Fujiu et al.
patent: 6294774 (2001-09-01), Ito et al.
patent: 6459798 (2002-10-01), Paritsky et al.
patent: 6884981 (2005-04-01), Proksch et al.
patent: 6941798 (2005-09-01), Yamaoka et al.
patent: 7116430 (2006-10-01), Degertekin et al.
patent: 7220962 (2007-05-01), Kawakatsu
patent: 2002/0000511 (2002-01-01), Schaffer et al.
patent: 2005/0242283 (2005-11-01), Hasegawa et al.
patent: 2006/0191329 (2006-08-01), Adderton et al.
patent: 2008/0049223 (2008-02-01), Iyoki et al.
patent: 2008/0223120 (2008-09-01), Girard et al.
patent: H10-104245 (1998-04-01), None
Takeshi Fukuma et al., “Development of low noise cantilever deflection sensor for multienvironment frequency-modulation atomic force microscopy,” Review of Scientific Instruments, 76, 053704 (2005).
Iyoki Masato
Shigeno Masatsugu
Watanabe Kazutoshi
Yamamoto Hiroyoshi
Brinks Hofer Gilson & Lione
Chowdhury Tarifur R
SII Nano Technology Inc.
Stock, Jr. Gordon J
LandOfFree
Optical displacement detection mechanism and surface... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical displacement detection mechanism and surface..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical displacement detection mechanism and surface... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2705567