Optical differential profile measurement apparatus and process

Details Optical differential profile measurement apparatus and process Optical differential profile measurement apparatus and process

1996-09-23

1998-07-21

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, G01B 902

Patent

active

057841632

ABSTRACT:
An interferometer forms a pair of projected sub-beams by decomposing a single coherent, linearly-polarized beam. These sub-beams are focussed by an objective lens onto a pair of test spots on a test surface. The reflections of these sub-beams are recombined to form an elliptically polarized return beam, which is broken into return sub-beams of opposing polarities in a polarizing beam splitter. The intensities of these return sub-beams are used to calculate a difference in height between the two test spots. When these test spots are aligned along a path of relative motion with the test surface, the resulting differences in height are added to form an accumulative profile of the test surface.

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