Optical: systems and elements – Light interference – Produced by coating or lamina
Reexamination Certificate
2006-03-14
2006-03-14
Chang, Audrey (Department: 2872)
Optical: systems and elements
Light interference
Produced by coating or lamina
C359S350000, C359S582000, C359S586000
Reexamination Certificate
active
07012753
ABSTRACT:
An optical device reflecting a range of wavelengths comprised between 10 nm and 20 nm comprises alternate superposed first and second layers. The first layers are made of metal or metallic compound and the second layers are formed by an amorphous silicon compound chosen from a-Si—Hx, a-Si—CHx, a-Si—Cx, a-Si—OHx, a-Si—Fx, a-Si—FHx, a-Si—Nx, a-Si—NHx, x being comprised between 0.01 and 0.3. The use of second layers of amorphous silicon compound enables the mechanical stresses of the optical device to be stabilized up to at least 200° C. The optical device is preferably used as reflector for a lithography mask in the extreme ultraviolet (EUV).
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Chang Audrey
Commissariat a l''Energie Atomique
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