Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1991-11-08
1993-08-24
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
359397, H01J 314
Patent
active
052391787
ABSTRACT:
A device is described for three-dimensional examination with a confocal beam path, in which an illumination grid (12; 22; 31; 83) is imaged in a focal plane (13f; 87), said plane being located on or in the vicinity of surface (14o) of object (14). The radiation reflected in the focal plane is imaged directly by a beam splitter onto the receiving surface of a CCD receiver (17; 91). The illumination grid (12; 22; 31; 83) is then imaged on the receiver surface either by the photosensitive areas of the receiver acting as confocal diaphragms or by signals from the detector elements which only receive light scattered outside focal plane (13f; 87) not being taken into account in the evaluation or being taken into account separately.
The illumination grid size generated in focal plane (13f; 87) can be either fixed or variable. A variable illumination grid size can be produced for example by an LED array. The device also makes examinations in transmitted light possible.
REFERENCES:
patent: 3013467 (1961-12-01), Minsky
patent: 3076890 (1963-02-01), Guter, Jr.
patent: 3774024 (1973-11-01), Deaton
patent: 4129775 (1978-12-01), O'Meara
patent: 4407008 (1983-09-01), Schmidt et al.
patent: 4806004 (1989-02-01), Wayland
patent: 4827125 (1989-05-01), Goldstein
patent: 4873653 (1989-10-01), Grosskopf
patent: 4882498 (1989-11-01), Cochran et al.
patent: 5028802 (1991-07-01), Webb et al.
patent: 5032720 (1991-07-01), White
patent: 5122653 (1992-06-01), Ohki
Donnelly, J. P. et al., "Two-Dimensional Surface-Emitting Arrays of GaAs/AlGaAs Diode Lasers", SPIE, Laser Diode Technology and Applications, vol. 1043, 1989, pp. 92-99.
Hamilton, D. K. et al., "Three-Dimensional Surface Measurement Using the Confocal Scanning Microscope", Appl. Phys. B, vol. 27, 1982, pp. 211-213.
Derndinger Eberhard
Grosskopf Rudolf E.
Knupfer Klaus
Carl Zeiss
Le Que T.
Nelms David C.
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